MKS Instruments Inc. of Andover, Mass., today claimed a major U.S.-based chip manufacturer has chosen MKS’s Spectra products for process control in its first 300mm fab. MKS said the unnamed company ...
Andover, Mass.-based MKS Instruments Inc. has developed an in-situ sensor information system that provides fully automated monitoring of cluster tool vacuum environments, the company said today. The ...
A new research report cited IBM and MKS as the best Agile development management tool vendors. The two companies "led the pack with the best overall current feature sets," according to the executive ...
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