The Thermo Scientific Phenom XL G2 Desktop Scanning Electron Microscope (SEM) automates quality control procedures, providing accurate, reproducible results while freeing up time for more important ...
A new technical paper titled “Scanning electron microscopy-based automatic defect inspection for semiconductor manufacturing: a systematic review” was published by researchers at KU Leuven and imec.
Unlike optical microscopy, SEM does not rely on light waves but instead uses a beam of electrons to interact with materials, enabling magnifications up to 300,000× and resolutions approaching 1 nm. 1 ...
The interaction volume of a characteristic X-Ray emission can be seen in Figure 1. Typical EDS analysis in an SEM is carried out at relatively high energy (greater than 10 kV), which results in a vast ...
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