Abstract: We demonstrate a fiber-optic micro-electron-mechanical systems (MEMS) accelerometer based on a symmetric push-pull spring structure made by micromachining on a silicon substrate, which ...
Abstract: MEMS accelerometers often encounters a trade-off between sensitivity and bandwidth. To overcome this limitation and achieve a high bandwidth without compromising sensitivity, we have ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results
Feedback