A Rapid Hot-Embossing Prototyping Approach Using SU-8 Molds Coated With Metal and Antistick Coatings
Abstract: In this paper, we have developed a rapid prototyping process using hybrid master molds for hot-embossing lithography. The hybrid master mold developed here typically consists of a structural ...
High-quality polycrystalline Si TFTs fabricated on stainless-steel foils by using sputtered Si films
Abstract: We have developed a low-temperature fabrication process (/spl les/ 200/spl deg/C for high-quality polycrystalline Si thin-film transistors (poly-Si TFTs) on flexible stainless-steel foils.
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