Here, we report a versatile soft x-ray diffraction microscope with 70- to 90-nm resolution by using two different tabletop coherent soft x-ray sources-a soft x-ray laser and a high-harmonic source. We ...

Researchers have designed an optical lens with the highest free-space numerical aperture to date, achieving a value of just under 1. As the numerical aperture indicates the highest possible resolution ...

Optical measurement techniques collecting light intensity in the far-field such as conventional and confocal microscopy or coherence scanning interferometry (CSI) enable fast and contactless ...

The future of semiconductor technology is often viewed through the lenses of photolithography equipment, which continues to offer better resolution for future process nodes despite an almost perpetual ...

Seoul, September 3, 2025 – SK hynix Inc. announced it has assembled what the company said is the industry’s first high numerical aperture extreme ultraviolet lithography (NA EUV) lithography system ...